Koh Young

Meister D/D+

True 3D Measurement for High Density Substrates, Shiny Components, and Highly Reflective Components.

Category 3D measurement for semicon applications
Our solution Semicon testing and inspection
Supplier Koh Young

Main features and benefits of the device

  • In-line/ off-line configuration
  • Resolution 5 (8) um
  • 3D Shadow free moiré
  • 8 projections
  • 12 Mpx camera
  • Z axis resolution = 1 um
  • Inspection speed 300 (768) mm2/s
  • Warp compensation +/- 5 mm
  • Min. objects height 100 um pitch 50 um

Are you interested in this product or want to find out more information?


Ing. Miloš Drlík

Key Account Manager

+420 727 872 614

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